Specifications
| Connection Vacuum Inlet Flange | DN 63 CF (4.5") |
| Connection vacuum outlet flange | DN 16 ISO-KF (NW16) |
| Cooling Method | Air Cooling (convection) Air Cooling (forced - fan) Water Cooling |
| Supply Voltage | DC 24V DC 48V |
| Pumping Speed Air Nitrogen (@50Hz or max @default setting) | 0.090 |
| Pressure Ultimate | 5.000 × 10⁻⁸ |
TURBOVAC 90 iX - DN 63 CF (Anybus)
Variant
Explore the range of variants given below to compare the product
| Short Description | Part Number | variantTmpPerformanceModel |
|---|---|---|
| 810011V1000 | TURBOVAC i - frontend 1 (basic) | |
| 810011V2000 | TURBOVAC i - frontend 2 (Anybus/Fieldbus extention) | |
| 810011V3300 | TURBOVAC iX - Xtention box controller | |
| 810031V1000 | TURBOVAC i - frontend 1 (basic) | |
| 810031V2000 | TURBOVAC i - frontend 2 (Anybus/Fieldbus extention) | |
| 810031V3300 | TURBOVAC iX - Xtention box controller | |
| 810041V1000 | TURBOVAC i - frontend 1 (basic) | |
| 810041V2000 | TURBOVAC i - frontend 2 (Anybus/Fieldbus extention) | |
| 810041V3000 | TURBOVAC iX - Xtention box controller | |
| 810041V3300 | TURBOVAC iX - Xtention box controller |
TURBOVAC i/iX
TURBOVAC i is a well-proven turbomolecular pump platform ranging from 90 to 1450 l/s. TURBOVAC i comes with the latest hybrid bearing design offering a permanent magnet upper bearing paired with an oil-free lower mechanical bearing offering the cleanest high vacuum conditions.
With TURBOVAC i we offer variants covering UHV (Ultra High Vacuum), throughput IND (Industrial) as well as iR (radiation robust) variants with remote electronics. TURBOVAC i pumps are available with a compact interface offering the control of up to two accessories, basic RS485, USB and DIGITAL I/O control. The TURBOVAC i series also offers the full spectrum of field bus support. The universal connection called "Anybus" enables communication via Profibus, Ethernet IP, ProfiNET as well as EtherCAT through selectable modules.
TURBOVAC iX also offers the Anybus interface, the ability to control your fore vacuum pump, and up to 6 accessories, a gauge interface turning the pump into a full vacuum control solution. Along with single inlet pumps, we offer a wealth of multi-inlet, cartridge pumps, and customized products via our Customer Focused Engineering team - please come and talk to our sales teams.
TURBOVAC i pumps, in general, come stand-alone - the suitable power supply unit, comms/power cables, and cooling options need to be ordered separately. TURBOVAC 1350, 1450 and the 850, 950 IND variants always come already equipped with a water cooling block.
Features and Benefits
- Superior performance - high pumping speed for light gases combined with high compression
- Stress-free operation
- High flexibility in our platform for standard and especially in customized products
- Higher resistance to particles
- Smart interfaces and intuitive software platform with LeyAssist
- Operation in any orientation
General Product Information
| Accessories / Scope of Supply | TURBOVAC i pumps come stand-alone - the suitable power supply unit, comms/power cables, and cooling options need to be ordered separately. IND industrial variants come with an equipped water cooling unit and are water cooling only. |
| Connection vacuum outlet flange | DN 16 ISO-KF (NW16) |
| Connection Vacuum Inlet Flange | DN 63 CF (4.5") |
| Cooling Method |
Air Cooling (convection)
Air Cooling (forced - fan) Water Cooling |
| Dimension Height | 0.200 |
| Dimension Length | 0.114 |
| Dimension Width | 0.114 |
| Supply Frequency | DC Voltage |
| Supply Voltage |
DC 24V
DC 48V |
| Dimension Comments | The dimensions length, width and height try to describe the outer shape of this particular product in its typical orientation when standing on the ground. We always recommend checking the detailed dimensions given in 2D drawings in the instruction manual or the 3D shapes given in 3D models. |
| Connection Inlet / Outlet Flange | DN 63 CF (4.5") | DN 16 ISO-KF (NW16) |
| ProductCertification |
CE
UL CSA |
Environmental Conditions
| Temperature Ambient Operation Max | 40.00 |
| Temperature Ambient Storage Max | 70.00 |
| Temperature Ambient Operation Min | 5.00 |
| Temperature Ambient Storage Min | -15.00 |
| Magnetic Field Resistance Max (covering worst direction - come and consult us for more details) | 5.500 × 10⁻³ T |
Classification
| Dry or Wet Pump | Dry |
| Product Pressure Range |
High Vacuum: 1·10⁻³ - 1·10⁻⁷ mbar
Ultra High Vacuum: 1·10⁻⁷ - 1·10⁻¹¹ mbar |
| High / Medium / Rough Vacuum Classification | High Vacuum Pump |
| Vacuum Pump Technology | Turbomolecular Pump - hybrid bearing oil free |
Performance Data
| Compression Ratio Air Nitrogen | 1.000 × 10¹¹ |
| Compression Ratio Helium | 1.000 × 10⁸ |
| Compression Ratio Hydrogen | 5.000 × 10⁷ |
| Pressure Ultimate | 5.000 × 10⁻⁸ |
| Pumping Speed Air Nitrogen (@50Hz or max @default setting) | 0.090 |
| Pumping Speed Argon | 0.083 |
| Pumping Speed Helium | 0.090 |
| Pumping Speed Hydrogen | 0.078 |
| Performance Comment | The compression of a TMP is a value describing how good the design can compress a gas type at special conditions. Compression data is measured only using the CF flange variants. The values are stated for all family members. For some pump classes we are stating different pumping speeds ISO > CF flange as small differences in geometry influence their performance leading to a difference >5%. |
| Pressure Backing Max | 1400.00 |
| Compression Ratio Argon | 1.000 × 10¹¹ |
Connectivity - Communication Interface
| Communication Interface Protocol | USS Universal Serial Interface Protocol |
| Communication Interfaces Customer |
ANYBUS socket IP20 for all modules
REMOTE X1 (Parallel I/O) USB |
| Connection electrical comms interface connector |
ANYBUS socket IP20 for all modules
DSUB HD 15-PIN - Female (high density) USB type B - Female |
Variants
| variantTmpPerformanceModel | TURBOVAC iX - Xtention box controller |
Operation Conditions - Limitations
| Flow Cooling Water Min | 8.333 × 10⁻⁶ |
| Flow Cooling Water Max | 1.667 × 10⁻⁵ |
| Pressure Permissible Cooling Water - Min and Max |
4.000 × 10⁵
4.000 × 10⁵ |
- 300554863_035_Instructions.pdf - Brazilian Portuguese - Instructions
- 301064864_002_Instructions.pdf - English - Instructions
- 301019041_002_Instructions.pdf - English - Instructions
- 300554863_002_Instructions.pdf - English - Instructions
- 3610-0041-02-TURBOVACi.pdf - English - Sales Material
- 3610 0041 02_TURBOVACi_HR.pdf - English - Sales Material
- Elevator_Pitch_Turbovac_EN_DE_Leybold_160817.pdf - English, German - Sales Material
- Elevator_Pitch_TurbovacIX_EN_DE_Leybold_160817.pdf - English, German - Sales Material
- 301064864_003_Instructions.pdf - French - Instructions
- 301019041_003_Instructions.pdf - French - Instructions
- 300554863_003_Instructions.pdf - French - Instructions
- 301064864_001_Instructions.pdf - German - Instructions
- 301019041_001_Instructions.pdf - German - Instructions
- 300554863_001_Instructions.pdf - German - Instructions
- 301064864_004_Instructions.pdf - Italian - Instructions
- 300554863_004_Instructions.pdf - Italian - Instructions
- 301064864_012_Instructions.pdf - Japanese - Instructions
- 300554863_012_Instructions.pdf - Japanese - Instructions
- 301064864_014_Instructions.pdf - Korean - Instructions
- 300554863_014_Instructions.pdf - Korean - Instructions
- 301064864_007_Instructions.pdf - Russian - Instructions
- 300554863_007_Instructions.pdf - Russian - Instructions
- 301064864_011_Instructions.pdf - Simplified Chinese - Instructions
- 300554863_011_Instructions.pdf - Simplified Chinese - Instructions
- 301064864_006_Instructions.pdf - Spanish (European) - Instructions
- 300554863_006_Instructions.pdf - Spanish (European) - Instructions
- 301064864_026_Instructions.pdf - Traditional Chinese - Instructions
- 300554863_026_Instructions.pdf - Traditional Chinese - Instructions